University of California, Berkeley

Electrical Engineering and Computer Sciences Department

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EE 143, Fall 2014
Microfabrication Technology

Tues. and Thurs: 12:30 pm - 2:00 p.m.
180 Tan Hall

Laboratory Sections:

Section x:  Monday, 9:00-12 noon in 218 Cory (but will poll the class)
Section 13:  Monday, 2:00 - 5:00 p.m., 218 Cory Hall
Section 14:  Wednesday, 9:00 - 12:00 noon, 218 Cory Hall
Section 15:  Wednesday, 1:00-4:00 p.m., 218 Cory Hall
Section 16:  Thursday, 3:00 - 6:00 p.m., 218 Cory Hall
Section 17:  Friday, 12:00 - 3:00 p.m., 218 Cory Hall


The prerequisites for this course are Physics 7B and EE 40. It is assumed that you are familiar with the following topics:

  • Fundamentals of materials, including crystalline versus amorphous structure, and the characteristics of semiconductors, insulators, and conductors.
  • Basic chemistry.
  • Elementary semiconductor physics and device operation for pn junctions and MOS field-effect transistors (MOSFETs).
  • Analysis and design of simple MOS analog and digital circuits.

In addition to the above, those who have taken EE 130 will find the concepts in this course much easier to understand, since greater knowledge of semiconductor physics helps to elucidate the reasons for certain aspects of device design.


  • Required:
    • R. C. Jaeger, Introduction to Microelectronic Fabrication (Vol. V of the Modular Series on Solid State Devices), 2nd Ed. Upper Saddle River, New Jersey: Prentice Hall, 2002.

    • Various materials to be distributed throughout the course.

  • References:  (some of these are on reserve in the Engineering Library)
    • S. Wolf and R. N. Tauber, Silicon Processing for the VLSI Era, Volume 1: Process Technology, 2nd Ed. Sunset Beach, California: Lattice press, 1999.

    • S. Wolf, Silicon Processing for the VLSI Era, Volume 2: Process Integration, Sunset Beach, California: Lattice Press, 1990.

    • Plummer, Deal, and Griffin, Silicon VLSI Technology: Fundamentals, Practice, and Modeling, 2nd Ed. Prentice Hall, 2000.

    • W. Maly, Atlas of IC Technologies: An Introduction to VLSI Processes, Redwood City, California: Benjamin-Cummings Pub Co., 1987.
    • M.J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd Ed. CRC Press, 2002.
    • B. Streetman and S. Banerjee, Solid-State Electronic Devices, 6th Ed. Prentice-Hall, 2005.

Professor Clark T.-C. Nguyen
574 Cory Hall
Phone: (510) 642-6251

Office Hours:
Monday, 1:30 - 2:30 p.m., 574 Cory
Wednesday, 12:00 - 1:00 p.m., 574 Cory

Teaching Assistants:

Head TA:  Mr. Wei-Chang Li
373 Cory Hall
Phone:  (510) 666-6224

Office Hours:
Tu 3-4:30 p.m., Th 10:30 a.m. - 12 noon (tentative)
367 Cory

Lab TA:  Mr. Jalal Naghsh Nilchi
373 Cory Hall
Phone:  (510) 210-5336

Lab TA:  Ms. Ruonan Liu
373 Cory Hall
Phone:  (614) 285-5637

Instructional Support Assistant:
Heather Levien/Alexander Burr
253 Cory Hall
(510) 642-3497

 Last updated 08/25/14 by HL