University of California, Berkeley
Electrical Engineering and Computer Sciences Department
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EE143, Fall 2016
Microfabrication Technologies

Instructor:       

GSIs:              

Objective:

  • EE143 teaches the fundamentals of integrated-circuit (IC) fabrication, giving the student a basic understanding of IC processes and the effect of processing choices on device performance.
  • Students will learn to use process simulation tools and fabricate as well as characterize devices in the laboratory.

Prerequisite: Physics 7B and EE 16A/B. It is assumed that you are familiar with:

  • Fundamentals of materials, including crystalline versus amorphous structure, and the characteristics of semiconductors, insulators, and conductors.
  • Basic chemistry.
  • Elementary semiconductor physics and device operation for pn junctions and MOS field-effect transistors (MOSFETs).
  • Analysis and design of simple MOS analog and digital circuits.
  • In addition to the above, those who have taken EE 130 will find the concepts in this course much easier to understand, since greater knowledge of semiconductor physics helps to elucidate the reasons for certain aspects of device design.

Textbook: R. C. Jaeger, Introduction To Microelectronic Fabrication (2nd edition), Prentice Hall, 2001

Lectures:         Tuesdays, Thursdays 11:10 am to 12:30 pm @ 241 Cory                               

Lab Sections:   Mon 9-12; Wed 9-12; Wed 4-7; Th 3-6; Fri 12-3 (Pending)

Laboratory Requirements:

  • Lab attendance: 10 pts (5% of the total grade).
    • Each absence results in -2 pts. Each lateness results in -1 pt. 
    • Students receiving a lab attendance grade of 0 pts or less will automatically fail the course.
    • Make-up lab sections are allowed (student will be attending a different lab section for that week), however, prior written request must be submitted to Professor Wu. Students attending pre-approved make-up sections will not lose points.
    • Note that being unprepared, unwilling to participate in the lab activities, and/or not following the safety procedures will result in losing lab attendance points.
  • Lab Quizzes: (5% of the total grade).
    • They will be given often (unannounced) at the beginning of each lab.
  • Lab Report 1: 100 pts (15% of the total grade).
  • Lab Report 2: 100 pts (10% of the total grade).
    • Note for both Lab Reports: For every day that it is turned in late, you will lose 20 pts.  We will not collect after 4 days past the deadline.

Exams:

  • Midterm 1: 10/4/16 (Tue) in class (Closed book, one page notes allowed)
  • Midterm 2: 11/1/2015 (Tue) in class (Closed book, two pages of notes allowed)
  • Final Exam: 12/14/16 (Wed), 8-11 am (Closed book, three pages of notes allowed)

Grading:

  • Laboratory: 35%
    • Includes quizzes, lab work, and reports
    • You must complete all labs to pass the course!
  • Homework: 5%
    • Lowest score will be dropped from grade calculation
    • (You can miss one HW without impacting your grade)
  • Midterms: 15% x 2 = 30%
    • Closed book. One sheet of notes allowed.
  • Final Exam: 30%
    • Closed book. 3 sheets of notes allowed.

  
Academic Dishonesty:
Cheating will result in automatic Fail. Copying homeworks or lab reports is considered cheating.

Course Accommodations:
Students may request accommodation of religious creed, disabilities, and other special circumstances.  Please make an appointment with Prof. Wu to discuss your request before the end of second week (Sept. 2), so that he can plan accordingly in advance.

Classroom Etiquette:

  • Arrive in class on time! 
  • Turn off cell phones.
  • No distracting conversation -- relevant questions are encouraged
 Last updated August 25, 2016