University of California, Berkeley

EE 143, Spring 2010
Microfabrication Technology

Tues. and Thurs: 2:00 pm - 3:30 pm
3108 Etcheverry Hall

Laboratory Sections:

Section 101:  Monday, 2:00 - 5:00 pm, 218 Cory Hall
Section 102:  Tuesday, 10:00 - 1:00 pm, 218 Cory Hall
Section 103:  Wednesday, 9:00 - 12:00 noon, 218 Cory Hall
Section 106:  Wednesday, 1:00-4:00 pm, 218 Cory Hall
Section 104:  Thursday, 8:00 - 11:00 am, 218 Cory Hall
Section 105:  Friday, 9:00 - 12:00 noon, 218 Cory Hall

The prerequisites for this course are Physics 7B and EE 40. It is assumed that you are familiar with the following topics:

• Fundamentals of materials, including crystalline versus amorphous structure, and the characteristics of semiconductors, insulators, and conductors.
• Basic chemistry.
• Elementary semiconductor physics and device operation for pn junctions and MOS field-effect transistors (MOSFETs).
• Analysis and design of simple MOS analog and digital circuits.

In addition to the above, those who have taken EE 130 will find the concepts in this course much easier to understand, since greater knowledge of semiconductor physics helps to elucidate the reasons for certain aspects of device design.

Texts:

• Required:
  • R. C. Jaeger, Introduction to Microelectronic Fabrication (Vol. V of the Modular Series on Solid State Devices), 2^nd Ed. Upper Saddle River, New Jersey: Prentice Hall, 2002.
  
  
  • Various material to be distrbuted throughout the course.


• References:  (some of these are on reserve in the Engineering Library)
  • S. Wolf and R. N. Tauber, Silicon Processing for the VLSI Era, Volume 1: Process Technology, 2^nd Ed. Sunset Beach, California: Lattice press, 1990.
  
  
  • S. Wolf, Silicon Processing for the VLSI Era, Volume 2: Process Integration, Sunset Beach, California: Lattice Press, 1990.
  
  
  • Plummer, Deal, and Griffin, Silicon VLSI Technology: Fundamentals, Practice, and Modeling, 2^nd Ed. Prentice Hall, 2000.
  
  
  • W. Maly, Atlas of IC Technologies: An Introduction to VLSI Processes, Redwood City, California: Benjamin-Cummings Pub Co., 1987.

Course Details:

Course Information
Class Syllabus  (Updated!)
Grading and Normalization Procedure
Academic Dishonesty Policy

Lecturer:
Professor Clark Nguyen
574 Cory Hall
Phone: (510) 642-6251
ctnguyen@eecs.berkeley.edu

Office Hours:
Monday, 10:30 - 12:00 noon, 574 Cory
Thursday, 9:00 - 10:30 pm, 574 Cory

Teaching Assistants:

Head TA:  Mr. Wei-Chang Li
373 Cory Hall
Phone:  (510) 643-9825
wcli@eecs.berkeley.edu

Office Hours:
Tuesday, Thursday 4:30-6:00 pm, 382 Cory Hall

Lab TA:  Mr. Yenhao Chen
373 Cory Hall
Phone:  (510) 684-7774
yenhaochen@berkeley.edu

Lab TA:  Mr. Jaewon Jang
550 Sutardja Dai Hall
Phone:  (510) 828-6828
jaewon@eecs.berkeley.edu

Lab TA:  Mr. Jack Yaung
550 Sutardja Dai Hall
Phone:  (510) 710-0543
jack@eecs.berkeley.edu

Instructional Support Assistant:
Rosita Alvarez-Croft
253 Cory Hall
(510) 643-4976
rosita@eecs.berkeley.edu