University of California, Berkeley
Electrical Engineering and Computer Sciences Department
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EE245, Fall 2007
Introduction to MEMS Design

Tuesday and Thursday:  9:30 am - 11:00 pm
106 Moffitt Hall
NOTE:  Effective Sept. 11th, the class will meet in 3108 Etcheverry

Discussion Sections:
Section 101 - Friday, 1:00 to 2:00 pm, 293 Cory.
Section 102 - Friday, 4:00 to 5:00 pm, 293 Cory.

Prerequisite:  Graduate standing in engineering or science; undergraduates with consent of instructor.

Note that the prerequisite requirement (or apparent lack of one) for this course reflects the fact that the course itself is meant to serve all engineering departments.  this is not to say that no prior knowledge is required for this course; rather, it is more a statement that if you lack the necessary background knowledge, you will need to study and learn the material somewhat independently.   In particular, although some of the background material will be covered in lecture, there is simply not enough time to do a thorough job of it.   Thus, those less familiar with the material will need to turn to supplemmentary materials, such as the reference texts.

Note that this course will rely on concepts from numerous disciplines, from electrical engineering, to mechanical engineering, to materials science, to bioengineering.   Thus, it is likely that nearly everyone will need to struggle with unfamiliar material at some point in the course.



  • S. Senturia,  Microsystem Design, 2nd Printing
  • Various material to be distributed throughout the course.


  • G. Kovacs,  Micromachined Transducers Sourcebook
  • Jaeger,  Introduction to Microelectronic Fabrication (Vol. V of the Molecular Series on Solid State Devices), 2nd Edition

References:  (on reserve)

  • C. Liu,  Foundations of MEMS
  • N. Maluf,  An Introduction to Microelectromechanical Systems Engineering
  • J. Pelesko & D. Bernstein,  Modeling MEMS and NEMS

Professor Clark T. Nguyen
574 Cory Hall
Phone: (510) 642-6251

Office Hours:
Tues., 1:30-3:00 pm, 574 Cory Hall
Thurs., 3:00-4:30 pm, 574 Cory Hall (to be modified in case of conflicts)

Teaching Assistants:

Li-Wen Hung
373 Cory Hall
Office Hours:  Monday, 9:00-10:00 am and 1:30-2:30 pm
382 Cory Hall

Yang Lin
Office Hours:  Wednesday, 11:00-12:00 noon and 2:00-3:00 pm
382 Cory Hall

Course Administrative Assistant:
Rosita Alvarez-Croft
(510) 643-4976

Course Details:
Course Information
Grading Procedure
Academic Dishonesty Policy

Course Description:
Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro- and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. Also listed as Mechanical Engineering C218.

Course Format:   Two one and a half hour lectures and one hour of discussion per week.

[4 Units]


  • Welcome to EE245

  • The last lecture will be on Nov. 29th. The final exam will be on Sat., Dec. 15th from 8:00 - 11:00 am in 277 Cory Hall.
  • Final Exam Information Sheet

  • Midterm Solutions

  • Project Description Sheet

  • The midterm exam will take place on Tuesday, Oct 30th, during class at its regular time and place, i.e., in 3108 Etcheverry from 9:30 - 11:00 a.m.   Note that this is different from the original tentative date indicated in your syllabus.

  • Midterm Information Sheet

Lecture Notes:

Discussion Section Questions:


Homework 1: Homework #1 Solutions
Homework 2: Homework #2 Solutions
Homework 3: Homework #3 Solutions
Homework 4:
Cadence Tutorial
Homework #4 Solutions
Homework 5: Homework #5 Solutions
Homework 6:   (Revised 11/20/07)
Homework #6 Solutions
SPICE Netlist
Homework 7:
You will need this text file for the simulation
Sample File
Homework #7 Solutions
SPICE Netlist


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 Last updated 12/13/07