EE C245 / ME C218, Fall 2009
Introduction to MEMS Design
Tues. and Thurs: 3:30 am - 5:00 pm
103 Moffitt Library
Section 101: Monday, 5:00 - 6:00 pm, 241 Cory Hall
Graduate standing in engineering or science; undergraduates with consent of instructor.
- Note that the prequisite requirement (or apparent lack of one) for this course reflects the fact that the course itself is meant to serve all engineering departments. This is not to say that no prior knowledge is required for this course; rather, it is more a statement that if you lack the necessary background knowledge, you will need to study and learn the material somewhat independently. In particular, although some of the background material will be covered in lecture, there is simply not enough time to do a through job of it. Thus, those less familiar with the material will need to turn to supplementary materials, such as the reference texts.
Note that this course will rely on concepts from numerous disciplines, from electrical engineering, to mechanical engineering, to materials science, to chemical engineering. Thus, it is likely that nearly everyone will need to struggle with unfamiliar material at some point in the course.
S. Senturia, Microsystem Design, 2nd Printing
Various material to be distrbuted throughout the course.
G. Kovacs, Micromachined Transducers Sourcebook
Jaeger, Introduction to Microelectronic Fabrication (Vol. V of the Modular Series on Solid State Devices), 2ndEdition
- References: (on reserve)
C. Liu, Foundations of MEMS
N. Maluf, An Introduction to Microelectromechanical Systems Engineering
J. Pelesko & D. Bernstein, Modeling MEMS and NEMS
- Course Details:
Grading and Normalization Procedure
Academic Dishonesty Policy
Professor Clark Nguyen
574 Cory Hall
Phone: (510) 642-6251
Monday, 2:30 - 4:00 pm, 574 Cory
Wednesday, 10:30 - 12:00 pm, 574 Cory
Mr. Chih-Ming Lin
5101 Etcheverry Hall
Phone: (510) 643-9752
Tuesday, Thursday 10:30-12:00 pm, 571 Cory Hall (tentative)
Instructional Support Assistant:
253 Cory Hall