University of California, Berkeley

Electrical Engineering and Computer Sciences Department

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Fall 2010 Lecture Notes:

No. Date Lecture Module PDF
(marked)
Reading
1 Aug. 26 Administrative Information, MEMS Roadmaps, Benefits of Miniturization PDF PDF
PDF
S: §1.1-1.4
2 Aug. 31 Benefits of Scaling I: faster speed (transistors, micromechanical resonators) PDF PDF
PDF
none
3 Sept. 2 Benefits of Scaling II: lower power consumption (micro-ovens), higher sensitivity (gas sensors)   PDF
PDF
none
4 Sept. 7 Benefits of Scaling III   PDF S: §3.1-3.2.3,  §3.2.6,  §3.3.1
J: §2.1,  §2.3-2.5,  §3.1-3.3,  §3.6,  §6.1-6.3
5 Sept. 9 Process Modules I: Oxidation and Film Deposition PDF PDF
PDF
S: §3.2.5,  §3.3.4.1,  §3.3.5-3.3.6
J: §2.2,  §4.1-4.5,  §5.1-5.5
6 Sept. 14 Process Modules II: Oxidation, Film Deposition, Lithography Etching, and Doping PDF PDF
PDF
PDF
S: §4.1-4.4
J: §11.4.1-11.4.2
7 Sept. 16 Process Modiles III: Lithography, Etching, and Doping   PDF
PDF
S: §8.3,  §13.2.3
J: §11.4.3-11.4.4
8 Sept. 21 Surface Micromachining: Lithography, Etching and Doping PDF [PDF]
[PDF]
[PDF]
Etch Rates for Micromachining Processing
Etch Rates for Micromachining Processing—Part II
Surface Micromachining for Microelectromechanical Systems
9 Sept. 23 Surface Micromachining II   [PDF]
[PDF]
S: §3.3.4.2-3.3.4.3
J: §11.2-11.3,  §11.6
10 Sept. 28 Surface Micromachining and Surface Micromachining III   [PDF]
[PDF]
S: §8.1-8.2,  §8.4
11 Sept. 30 Surface Micromachining and Bulk Micromachining [PDF] [PDF]
[PDF]
[PDF}
[PDF]
S: §7.2.2,  §9.1-9.3
12 Oct. 5 Bulk Micromachining: Mechanics of Materials I [PDF] [PDF]
[PDF]
none
13 Oct. 7 Machanics of Materials I & Mechanics of Materials II   [PDF]
[PDF]
S: §10.1-10.3
14 Oct. 12 Mechanics of Materials and Beam Bending [PDF] [PDF]
[PDF]
S: §10.5
15 Oct. 14 Microstructural Elements and Stress Gradients   [PDF]
[PDF]
S: §10.5.2,  Handout
16 Oct. 19 Microstructural Elements and Beam Combos   [PDF]
[PDF]
S: §5.1-5.6,  Handout
17 Oct. 21 Energy Methods [PDF] [PDF]
[PDF]
S: §6.1-6.4
18 Oct. 25 Energy Methods and Resonance Frequency [PDF] [PDF]
[PDF]
[PDF]
Handouts
19 Oct. 28 Equivalent Circuits I and Resonance Frequency [PDF] [PDF]
[PDF]
S: §6.6, §19.1-19.2, §21.1-21.2
  Nov. 2 MIDTERM EXAM      
20 Nov. 4 Equivalent Circuits I and Capacitive Transducers [PDF] [PDF]
[PDF]
[PDF]
Handout
21 Nov. 9 Capacitive Transducers   [PDF] S: §14.9,  §14.11.2
  Nov. 11 VETERAN'S DAY HOLIDAY      
22 Nov. 16 Capacitive Transducers and Electrical Stiffness   [PDF]
[PDF]
S: §19.1-19.4,
J: § 7.7,  §9.3,  §11.7
23 Nov. 18 Capacitive Transducers, Equivalent Circuits II and Comb Drive [PDF] [PDF]
[PDF]
[PDF]
S: §14.10-14.11,
S: Chapter 15
24 Nov. 23 Equivalent Circuits II   [PDF]
[PDF]
S: §16.1,  § 16.3-16.6
  Nov. 25 THANKSGIVING - HOLIDAY      
25 Nov. 30 Equivalent Circuits II, Gyros, Noise, and MDS [PDF]
[PDF]
[PDF]
[PDF]
[PDF]
Handouts
26 Dec. 2 Sensing Circuits   [PDF]
[PDF]
Handouts
  Dec. 7 Reading/Recitation/Review Day - No Lecture      
  Dec. 9 Reading/Recitation/Review Day - No Lecture      

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 Last updated 12/03/10 by RSAC