University of California, Berkeley

Electrical Engineering and Computer Sciences Department

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Fall 2009 Lecture Notes:

No. Date Lecture Module PDF
(marked)
Reading
1 Aug. 27 Admin & Overview, MEMS Roadmaps, Benefits of Miniturization PDF PDF S: §1.1-1.4
2 Sept. 1 Benefits of Scaling I: faster speed (transistors, micromechanical resonators) PDF PDF none
3 Sept. 3 Benefits of Scaling II: lower power consumption (micro-ovens), higher sensitivity (gas sensors)     PDF none
4 Sept. 8 Benefits of Scaling III: Oxidation and Film Deposition PDF PDF S: §3.1-3.2.3,  §3.2.6,  §3.3.1
J: §2.1,  §2.3-2.5,  §3.1-3.3,  §3.6,  §6.1-6.3
5 Sept. 10 Fabrication Process Modules I: oxidation, film deposition, lithography PDF PDF S: §3.2.5,  §3.3.4.1,  §3.3.5-3.3.6
J: §2.2,  §4.1-4.5,  §5.1-5.5
6 Sept. 15 Fabrication Process Modules II: Lithography, Etching and Doping   PDF
PDF
S: §4.1-4.4
J: §11.4.1-11.4.2
7 Sept. 17 Fabrication Process Modules III: Crystal Orientation, Etching, Doping, Ion Implantation, Predeposition and Diffusion     PDF S: §8.3,  §13.2.3
J: §11.4.3-11.4.4
8 Sept. 22 Surface Micromachining I: Basic polysilicon process flow, release, sacrificial and structural material choices. PDF [PDF]
[PDF]
Surface Micromachining for Microelectrical Systems
Etch Rates for Micromachining Processing
Etch Rates for Micromachining Processing - Part II
9 Sept. 28 Surface Micromachining II: Stiction   [PDF]
[PDF]
S: §3.3.4.2-3.3.4.3
J: §11.2-11.3,  §11.6

PolyMUMPs Design Handbook
SUMMiT V Design Manual
10 Sept. 29 Surface Micromachining III   [PDF]
[PDF]
S: §8.1-8.2,  §8.4
11 Oct. 1 Bulk Micromachining [PDF] [PDF]
[PDF]
S: §7.2.2,  §9.1-9.3
12 Oct. 5 Mechanics of Materials I [PDF]
[PDF]
[PDF]
[PDF}
none
13 Oct. 8 Mechanics of Materials II   [PDF]
[PDF]
S: §10.1-10.3
14 Oct. 13 Beam Bending   [PDF]
[PDF]
S: §10.5
15 Oct. 19 Microstructural Elements [PDF] [PDF]
[PDF]
S: §10.5.2,  Handout
16 Oct. 20 Beam Combos   [PDF]
[PDF]
S: §5.1-5.6,  Handout
17 Oct. 22 Energy Methods   [PDF]
[PDF]
S: §6.1-6.4
18 Oct. 29 Midterm Info. and Resonance Frequency [PDF] [PDF]
[PDF]
[PDF]
Handouts
19 Nov. 2 Resonance Frequency II and Equivalent Circuits I [PDF] [PDF] S: §6.6,  §19.1-19.2,  §21.1-21.2
  Nov. 3 Midterm Exam      
20 Nov. 6 Equivalent Circuits I [PDF] [PDF]
[PDF]
Handout
21 Nov. 9 Capacitive Transducers   [PDF] S: §14.9,  §14.11.2
22 Nov. 10 Electrical Stiffness   [PDF]
[PDF]
S: §19.1-19.4,
J: § 7.7,  §9.3,  §11.7
23 Nov. 12 Equivalent Circuits II & Comb Drive [PDF] [PDF]
[PDF]
[PDF]
S: §14.10-14.11,
S: Chapter 15
24 Nov. 23 Equivalent Circuits II   [PDF]
[PDF]
S: §16.1,  § 16.3-16.6
25 Nov. 24 Sensing Circuits [PDF] [PDF]
[PDF]
Class Notes
26 Dec. 1 Gyros, Noise and MDS [PDF] [PDF]  
27 Dec. 3 Gyros, Noise and MDS continued   [PDF]
[PDF]
Handouts
  Dec. 8 Reading / Recitation / Review Day - No Lecture      
  Dec. 19 Final Exam: Saturday, Dec. 19, 12:30-3:30 pm (Exam Group 20)      

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 Last updated 12/04/09 by RSAC