No.
|
Date
|
Lecture
|
Module
|
PDF
(marked)
|
Reading
|
1
|
Aug. 27
|
Admin & Overview, MEMS Roadmaps, Benefits of Miniturization
|
PDF
|
PDF
|
S: §1.1-1.4
|
2
|
Sept. 1
|
Benefits of Scaling I: faster speed (transistors, micromechanical resonators)
|
PDF
|
PDF
|
none
|
3
|
Sept. 3
|
Benefits of Scaling II: lower power consumption (micro-ovens), higher sensitivity (gas sensors)
|
|
PDF
|
none
|
4
|
Sept. 8
|
Benefits of Scaling III: Oxidation and Film Deposition
|
PDF
|
PDF
|
S: §3.1-3.2.3, §3.2.6, §3.3.1
J: §2.1, §2.3-2.5, §3.1-3.3, §3.6, §6.1-6.3
|
5
|
Sept. 10
|
Fabrication Process Modules I: oxidation, film deposition, lithography
|
PDF
|
PDF
|
S: §3.2.5, §3.3.4.1, §3.3.5-3.3.6
J: §2.2, §4.1-4.5, §5.1-5.5
|
6
|
Sept. 15
|
Fabrication Process Modules II: Lithography, Etching and Doping
|
|
PDF
PDF
|
S: §4.1-4.4
J: §11.4.1-11.4.2
|
7
|
Sept. 17
|
Fabrication Process Modules III: Crystal Orientation, Etching, Doping, Ion Implantation, Predeposition and Diffusion
|
|
PDF
|
S: §8.3, §13.2.3
J: §11.4.3-11.4.4
|
8
|
Sept. 22
|
Surface Micromachining I: Basic polysilicon process flow, release, sacrificial and structural material choices.
|
PDF
|
[PDF]
[PDF]
|
Surface Micromachining for Microelectrical Systems
Etch Rates for Micromachining Processing
Etch Rates for Micromachining Processing - Part II
|
9
|
Sept. 28
|
Surface Micromachining II: Stiction
|
|
[PDF]
[PDF]
|
S: §3.3.4.2-3.3.4.3
J: §11.2-11.3, §11.6
PolyMUMPs Design Handbook
SUMMiT V Design Manual
|
10
|
Sept. 29
|
Surface Micromachining III
|
|
[PDF]
[PDF]
|
S: §8.1-8.2, §8.4
|
11
|
Oct. 1
|
Bulk Micromachining
|
[PDF]
|
[PDF]
[PDF]
|
S: §7.2.2, §9.1-9.3
|
12
|
Oct. 5
|
Mechanics of Materials I
|
[PDF]
[PDF]
|
[PDF]
[PDF}
|
none
|
13
|
Oct. 8
|
Mechanics of Materials II
|
|
[PDF]
[PDF]
|
S: §10.1-10.3
|
14
|
Oct. 13
|
Beam Bending
|
|
[PDF]
[PDF]
|
S: §10.5
|
15
|
Oct. 19
|
Microstructural Elements
|
[PDF]
|
[PDF]
[PDF]
|
S: §10.5.2, Handout
|
16
|
Oct. 20
|
Beam Combos
|
|
[PDF]
[PDF]
|
S: §5.1-5.6, Handout
|
17
|
Oct. 22
|
Energy Methods
|
|
[PDF]
[PDF]
|
S: §6.1-6.4
|
18
|
Oct. 29
|
Midterm Info. and Resonance Frequency
|
[PDF]
|
[PDF]
[PDF]
[PDF]
|
Handouts
|
19
|
Nov. 2
|
Resonance Frequency II and Equivalent Circuits I
|
[PDF]
|
[PDF]
|
S: §6.6, §19.1-19.2, §21.1-21.2
|
|
Nov. 3
|
Midterm Exam |
|
|
|
20
|
Nov. 6
|
Equivalent Circuits I
|
[PDF]
|
[PDF]
[PDF]
|
Handout
|
21
|
Nov. 9
|
Capacitive Transducers
|
|
[PDF]
|
S: §14.9, §14.11.2
|
22
|
Nov. 10
|
Electrical Stiffness
|
|
[PDF]
[PDF]
|
S: §19.1-19.4,
J: § 7.7, §9.3, §11.7
|
23
|
Nov. 12
|
Equivalent Circuits II & Comb Drive
|
[PDF]
|
[PDF]
[PDF]
[PDF]
|
S: §14.10-14.11,
S: Chapter 15
|
24
|
Nov. 23
|
Equivalent Circuits II
|
|
[PDF]
[PDF]
|
S: §16.1, § 16.3-16.6
|
25
|
Nov. 24
|
Sensing Circuits
|
[PDF]
|
[PDF]
[PDF]
|
Class Notes
|
26
|
Dec. 1
|
Gyros, Noise and MDS
|
[PDF]
|
[PDF]
|
|
27
|
Dec. 3
|
Gyros, Noise and MDS continued
|
|
[PDF]
[PDF]
|
Handouts
|
|
Dec. 8
|
Reading / Recitation / Review Day - No Lecture
|
|
|
|
|
Dec. 19
|
Final Exam: Saturday, Dec. 19, 12:30-3:30 pm (Exam Group 20)
|
|
|
|