Special Issues in Semiconductor
Manufacturing
EECS 290H, 11:00 - 12:30 T&T in
293 Cory, Fall, 2005
Office Hours: Tuesday and Thursday
10-11am
This course addresses the issue of
transferring novel IC technologies to high volume, high yield production. Three
main topics will be covered:
- Experimental design
techniques are used to optimize an IC fabrication process. We will discuss
techniques ranging from simple comparison of treatments to complex
multivariate response surface analysis.
- The widespread application of statistical process control
(SPC) in IC production was a major strategic goal for the 1990s. The goal
for this decade is Advanced Process Control (APC). We will cover
traditional SPC methods and we will detail their continuing evolution
towards APC.
- Integrated circuits and fabrication processes must be
designed for optimum manufacturability. We will address this issue by
discussing several Design for Manufacturability techniques and tools.
The course is
self-contained for the student whose background includes IC processing (EE143)
and design (EE140 or EE141).
Teaching
Staff
Professor Costas J. Spanos
spanos@eecs
Phone: 510 643 6776
Fax : 510 642 2739
Office Hours: Tue/Thu 10-11am 510 Cory
Resources (Generally available on the
weekend prior to lectures)
Week
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Lecture
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Reading (restricted)
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Additional Material
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Assignments
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Solutions
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1st 8/29
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2nd 9/5
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3rd 9/12
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4th 9/19
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5th 9/26
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6th 10/3
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7th 10/10
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8th 10/17
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9th 10/24
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10th 10/31
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11th 11/7
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12th
11/14
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13th 11/21
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14th 11/28
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15th 12/5
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Last Updated 1/6/2006
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