EE245 Homework 1

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1.    Find a technical paper about MEMS through the web.  Paste the URL here:

2.    Go to the SUGAR HW1 web page and follow the directions.  How much deflection do you get of the resonator in the horizontal direction? 

3.    Find at least five different types of MEMS or MEMS-related products on the web.  Suggestions:

• pressure sensors
• accelerometers
• micro-mirrors for display applications
• micro-mirrors for fiber switching applications
• micro-tweezers for manipulation
• CAD tools specifically for MEMS applications
• packaging specifically for MEMS applications
• micro-fluidic or bioMEMS

4.    Go to the SIMPLer web page and

1. choose the process "NMOS transistor" and press start.
2. Move the slider until you are on step number 1, and press "calculate cross-section"
3. Move the slider forward one step at a time, and after each step press "calculate cross-section".
4. Choose different cross-sections by clicking on the border of the layout area.

How thick is the second oxide, and how many holes get punched through it in step 7?