Label #
|
Feature Name
|
Location in Above Image
|
1A |
Resolution
Test Patterns (1 per mask) |
Left Center |
1B |
Alignment
Marks and Verniers |
Left Bottom |
2A |
Diffused
Resistor |
Left Center |
2B |
Poly
Resistor |
Left Center |
2C |
Metal-to-Diffusion
Contact Chain |
Left Bottom |
2D |
Metal-to-Poly
Contact Chain |
Left Bottom |
3 |
Field
Oxide Capacitor |
Center |
4 |
Gate
Oxide Capacitor |
Center |
5 |
Intermediate
Oxide Capacitor |
Center |
6A |
Junction
Capacitor |
Center |
6B |
Long
Periphery Junction Capacitor |
Center |
7 |
Diode |
Center |
8 |
MOSFETs
of various lengths |
Center Bottom |
9 |
Long
Channel MOSFETs |
Center Bottom |
10 |
Large
MOSFET |
Center Bottom |
11 |
Field
Oxide MOSFET |
Center Bottom |
12 |
Circular
MOSFET |
Center Bottom |
13 |
Lateral
BJTs |
Center |
14 |
Inverter |
Center Bottom |
15 |
NOR
Gate |
Center Bottom |
16 |
Ring
Oscillator (17 stages + buffer) |
Right Bottom |
17A |
Metal-Poly
Contact Resistance Test Structure |
Right Top |
17B |
Metal-Diffusion
Contact Resistance Test Structure |
Right Top |
18 |
Aluminum-SiO2
Bimorph |
Right Center |
19 |
Campanile |
Right Top |
20 |
Cantilever
Array |
Left Top |
21 |
Heater
Platform |
Right Bottom |
- |
Designers'
Initials |
Center Bottom |