University of California, Berkeley

Electrical Engineering and Computer Sciences Department

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Fall 2014 Lecture Notes:

No. Date Lecture Module PDF
(marked)
Reading Video
1 Aug. 28 Admin & Overview, History of IC's   Lecture 1   Video
2 Sept. 2 Electronic Materials I: Silicon, Polysilicon   Lecture 2    
3 Sept. 4 Electronic Materials II & Process Module Overview I   Lecture 3w
Lecture 3m
   
4 Sept. 9 Process Module Overview II   Lecture 4 Jaegar: Chap. 1  
5 Sept. 11 Process Integration   Lecture 5 Jaeger: Chap. 1 Video
6 Sept. 16 Layout to Cross-Section   Lecture 6 Jaeger: Chap. 1  
7 Sept. 18 Lithography I Module 1   Jaegar: Ch. 2  
8 Sept. 23 Lithography II   Lecture 8m
Lecture 8w
Jaeger: Ch. 2  
9 Sept. 25 Oxidation I   Module 2 Lecture 9w Jaeger: Chap. 3  
10 Sept. 30 Oxidation II   Lecture 10 Jaeger: Ch. 3  
11 Oct. 2 Physical Film Deposition Module 3   Jaeger: Chap. 6  
12 Oct. 7 Chemical Film Deposition   Lecture 12m
Lecture 12w
Jaeger: Ch.6  
13 Oct. 9 Etching I Module 4 Lecture 13m
Lecture 13w
Jaeger: Ch.2  
14 Oct. 14 Etching II   Lecture 14m
Lecture14w
Jaeger: Ch. 2  
15 Oct. 16 Ion Implantation I     Jaeger: Ch.5  
16 Oct. 21 Ion Implantation II Module 5 Lecture 16 Jaeger: Ch. 5  
17 Oct. 23 Diffusion I Module 6 Lecture 17 Jaeger: Ch.4  
18 Oct. 28 Diffusion II   Lecture 18 Jaeger: Ch.4  
  Oct. 30 Midterm Exam        
19 Nov. 4 Diffusion III   Lecture 19 Jaeger: Ch.4  
20 Nov. 6 Interconnects   Lecture 20m
Lecture 20w
Jaeger: Ch. 7  
  Nov. 11 Academic & Administrative Holiday        
21 Nov. 13 Metal MEMS, Adv. CMOS I Module 7   Jaeger: Ch.9,11  
22 Nov. 18 Advanced CMOS II   Lecture 22w Jaeger: Ch.9  
23 Nov. 20 Adv. Isolation   Lecture 23m
Lecture 23
Jaeger: Ch.3, Ch. 9  
24 Nov. 25 VtDevice Characterization   Lecture 24m
Lecture 24w
Jaeger: Ch.9  
  Nov. 27 Academic & Administrative Holiday        
25 Dec. 2 Vt Implant: Threshold Voltage, Shallow vs. Deep   Lecture 25 Jaeger: Chap. 9  
26 Dec. 4 Device Characterization II   Lecture 26 Jaeger: Chap. 9  
  Dec. 9 Reading/Review/Recitation Week        
  Dec. 11 Reading/Review/Recitation Week        
  Dec. 19 Final Exam: Friday, Dec. 19, 8:00-11:00 a.m.  (Exam Group 17)
       

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 Last updated 04/30/10 by RSAC