No.
|
Date
|
Lecture
|
Module
|
PDF
(marked)
|
Reading
|
Video
|
1
|
Aug. 28
|
Admin & Overview, History of IC's
|
|
Lecture 1
|
|
Video
|
2
|
Sept. 2
|
Electronic Materials I: Silicon, Polysilicon
|
|
Lecture 2
|
|
|
3
|
Sept. 4
|
Electronic Materials II & Process Module Overview I
|
|
Lecture 3w
Lecture 3m
|
|
|
4
|
Sept. 9
|
Process Module Overview II
|
|
Lecture 4
|
Jaegar: Chap. 1
|
|
5
|
Sept. 11
|
Process Integration
|
|
Lecture 5
|
Jaeger: Chap. 1
|
Video
|
6
|
Sept. 16
|
Layout to Cross-Section
|
|
Lecture 6
|
Jaeger: Chap. 1
|
|
7
|
Sept. 18
|
Lithography I
|
Module 1
|
|
Jaegar: Ch. 2
|
|
8
|
Sept. 23
|
Lithography II
|
|
Lecture 8m
Lecture 8w
|
Jaeger: Ch. 2
|
|
9
|
Sept. 25
|
Oxidation I
|
Module 2
|
Lecture 9w
|
Jaeger: Chap. 3
|
|
10
|
Sept. 30
|
Oxidation II
|
|
Lecture 10
|
Jaeger: Ch. 3
|
|
11
|
Oct. 2
|
Physical Film Deposition
|
Module 3
|
|
Jaeger: Chap. 6
|
|
12
|
Oct. 7
|
Chemical Film Deposition
|
|
Lecture 12m
Lecture 12w
|
Jaeger: Ch.6
|
|
13
|
Oct. 9
|
Etching I
|
Module 4
|
Lecture 13m
Lecture 13w
|
Jaeger: Ch.2
|
|
14
|
Oct. 14
|
Etching II
|
|
Lecture 14m
Lecture14w
|
Jaeger: Ch. 2
|
|
15
|
Oct. 16
|
Ion Implantation I
|
|
|
Jaeger: Ch.5
|
|
16
|
Oct. 21
|
Ion Implantation II
|
Module 5
|
Lecture 16
|
Jaeger: Ch. 5
|
|
17
|
Oct. 23
|
Diffusion I
|
Module 6
|
Lecture 17
|
Jaeger: Ch.4
|
|
18
|
Oct. 28
|
Diffusion II
|
|
Lecture 18
|
Jaeger: Ch.4
|
|
|
Oct. 30
|
Midterm Exam
|
|
|
|
|
19
|
Nov. 4
|
Diffusion III
|
|
Lecture 19
|
Jaeger: Ch.4
|
|
20
|
Nov. 6
|
Interconnects
|
|
Lecture 20m
Lecture 20w
|
Jaeger: Ch. 7
|
|
|
Nov. 11
|
Academic & Administrative Holiday
|
|
|
|
|
21
|
Nov. 13
|
Metal MEMS, Adv. CMOS I
|
Module 7
|
|
Jaeger: Ch.9,11
|
|
22
|
Nov. 18
|
Advanced CMOS II
|
|
Lecture 22w
|
Jaeger: Ch.9
|
|
23
|
Nov. 20
|
Adv. Isolation
|
|
Lecture 23m
Lecture 23
|
Jaeger: Ch.3, Ch. 9
|
|
24
|
Nov. 25
|
VtDevice Characterization
|
|
Lecture 24m
Lecture 24w
|
Jaeger: Ch.9
|
|
|
Nov. 27
|
Academic & Administrative Holiday
|
|
|
|
|
25
|
Dec. 2
|
Vt Implant: Threshold Voltage, Shallow vs. Deep
|
|
Lecture 25
|
Jaeger: Chap. 9
|
|
26
|
Dec. 4
|
Device Characterization II
|
|
Lecture 26
|
Jaeger: Chap. 9
|
|
|
Dec. 9
|
Reading/Review/Recitation Week
|
|
|
|
|
|
Dec. 11
|
Reading/Review/Recitation Week
|
|
|
|
|
|
Dec. 19
|
Final Exam: Friday, Dec. 19, 8:00-11:00 a.m. (Exam Group 17)
|
|
|
|
|