EE143, Fall 2016
Microfabrication Technologies

• Weekly check list
  • Week 2: Prelab, Measurement
  • Week 3: Prelab, Measurement
  • Week 4: Prelab, Measurement
  • Week 5: Prelab, Measurement
  • Week 6: Prelab, Measurement
  • Week 7: Prelab, Measurement
  • Week 8: Prelab, Measurement
• Overall Device Process Flow
  • Overall fabrication process flow
  • EE143 NMOS process flow
• Tool References
  • Kasper mask aligner
  • Evaporator
  • Basic vacuum system
  • NanoSpec thin film measurement tool
  • Four point probe for resistivity measurement
  • Vernier scales for high resolution metrology