EE245, Fall 2007
Introduction to MEMS Design
Tuesday and Thursday: 9:30 am - 11:00 pm
106 Moffitt Hall
NOTE: Effective Sept. 11th, the class will meet in 3108 Etcheverry
Discussion Sections:
Section 101 - Friday, 1:00 to 2:00 pm, 293 Cory.
Section 102 - Friday, 4:00 to 5:00 pm, 293 Cory.
Prerequisite: Graduate standing in engineering or science; undergraduates with consent of instructor.
Note that the prerequisite requirement (or apparent lack of one) for this course reflects the fact that the course itself is meant to serve all engineering departments. this is not to say that no prior knowledge is required for this course; rather, it is more a statement that if you lack the necessary background knowledge, you will need to study and learn the material somewhat independently. In particular, although some of the background material will be covered in lecture, there is simply not enough time to do a thorough job of it. Thus, those less familiar with the material will need to turn to supplemmentary materials, such as the reference texts.
Note that this course will rely on concepts from numerous disciplines, from electrical engineering, to mechanical engineering, to materials science, to bioengineering. Thus, it is likely that nearly everyone will need to struggle with unfamiliar material at some point in the course.
Texts:
Required:
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S. Senturia, Microsystem Design, 2nd Printing
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Various material to be distributed throughout the course.
Supplementry:
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G. Kovacs, Micromachined Transducers Sourcebook
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Jaeger, Introduction to Microelectronic Fabrication (Vol. V of the Molecular Series on Solid State Devices), 2nd Edition
References: (on reserve)
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C. Liu, Foundations of MEMS
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N. Maluf, An Introduction to Microelectromechanical Systems Engineering
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J. Pelesko & D. Bernstein, Modeling MEMS and NEMS
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Lecturer:
Professor Clark T. Nguyen
574 Cory Hall
Phone: (510) 642-6251
ctnguyen@eecs.berkeley.edu
Office Hours:
Tues., 1:30-3:00 pm, 574 Cory Hall
Thurs., 3:00-4:30 pm, 574 Cory Hall (to be modified in case of conflicts)
Teaching Assistants:
Li-Wen Hung
373 Cory Hall
lwhung@eecs.berkeley.edu
Office Hours: Monday, 9:00-10:00 am and 1:30-2:30 pm
382 Cory Hall
Yang Lin
linyang@eecs.berkeley.edu
Office Hours: Wednesday, 11:00-12:00 noon and 2:00-3:00 pm
382 Cory Hall
Course Administrative Assistant:
Rosita Alvarez-Croft
(510) 643-4976
rosita@eecs.berkeley.edu
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Course Details:
Course Information
Grading Procedure
Syllabus
Academic Dishonesty Policy
Course Description:
Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro- and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. Also listed as Mechanical Engineering C218.
Course Format:
Two one and a half hour lectures and one hour of discussion per week.
[4 Units]
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- Lecture 1, Aug. 28, 2007
Course Overview / Definition and Incentives for MEMS
- Lecture 2, Aug. 30, 2007
Benefits of Scaling
- Lecture 3, Sept. 4, 2007
Oxidation & Film Deposition I
- Lecture 4, Sept. 6, 2007
Film Deposition II
- Lecture 5, Sept. 11, 2007
ALD Lithography
- Lecture 6, Sept. 13, 2007
Etching, I/I
- Lecture 7, Sept. 18, 2007
I/I, Diffusion
- Lecture 8, Sept. 20, 2007
Surface Micromachining
Surface Micromachining for Microelectromechanical Systems
Etch Rates for Micromachining Processing
Etch Rates for Micromachining Processing—Part II
- Lecture 9, Sept. 25, 2007
Subsurface Micromachining II
Five Level Surface Micromachining Technology Design Manual
PolyMUMPs Design handbook
- Lecture 10, Sept. 27, 2007
Bulk Micromachining
- Lecture 11, Oct. 2, 2007
Bulk Micromachining II
Wafer-to-Wafer Bonding for
Microstructure Formation
- Lecture 12, Oct. 4, 2007
Mechanics of Materials
- Lecture 13, Oct. 9, 2007
Material Properties
- Lecture 14, Oct. 11, 2007
Beam Bending
- Lecture 15, Oct. 16, 2007
Beam Combos
- Lecture 16, Oct. 18, 2007
Energy Methods
- Lecture 17, Oct. 23, 2007
Energy Methods II
- Lecture 18, Oct. 25, 2007
Equivalent Circuits & Energy Conserving Transducers
- Lecture 19, Nov. 1, 2007
Equivalent Circuits & Project
- Lecture 20, Nov. 6, 2007
Lossless Transducers
- Lecture 21, Nov. 8, 2007
Capacitive Transducers
- Lecture 22, Nov. 13, 2007
ke and Comb Drive
Laterally Driven Polysilicon Resonant Microstructures
Electrostatic Comb Drive Levitation and Control Method
- Lecture 23, Nov. 15, 2007
Input Modeling & Gyros
- Lecture 24, Nov. 16, 2007
Output Sensing
- Lecture 25, Nov. 19, 2007
Sensing Circuits
- Lecture 26, Nov. 20, 2007
Integration & Noise
High-Order Medium Frequency
Micromechanical Electronic Filters
- Lecture 27, Nov. 27, 2007
Noise
- Lecture 28, Nov. 29, 2007
Minimum Detectable Signal (MDS)
Correction for Slide 43
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