Updated 9/15/08

Using Cadence for MEMS Layout

Basic editing

Creating a New Cell View

Now you want to create a new cell view to define part of your layout. Select the library you just created in the library column of the library manager.
File->New->Cell View
Name your cell and under tool, select Virtuoso (view name should change to layout automatically)
A layout window should open as well as the LSW ("Layer Selection Window")

Setting up the display options

Type the keyboard shortcut e or Options->Display to bring up the display editor.
Select your x and y snap spacing to be something more reasonable like 1 or 0.1 (this is in units of microns).
Say OK.

Drawing Rectangles

Select a layer like poly1 in the LSW.
Click on the rectangle box on the left side of the layout window or type the keyboard shortcut r for rectangle.
You can either hide or ignore the box that comes up next and draw your rectangle in the layout window.
If you want to unhide the box while you're in "draw rectangle" mode, press F3. Try selecting a new layer in the LSW and draw another rectangle.
Isn't this fun?

Measuring Distances

You'll find the ability to measure things you've drawn very useful during layout. Use the ruler function on the left side of the layout window or use the keyboard shortcut k. Click on one side of the rectangle and then click the other side to measure its length.
In the ruler box, you can change the snap mode to diagonal or anyAngle to measure distances in non-Manhattan directions.
Press Shift-K to remove your rulers.

Drawing Other Shapes and Editing Shapes

If you look under the Create menu, you'll find commands to draw all sorts of other shapes. You can also edit your shapes. One edit that you'll find particularly useful is stretching your rectangles. There is another box on the left hand side of the layout window or the command can be found under the Edit menu (or the shortcut s). Click one side of the rectangle and click again where you would like to move this side.

It shouldn't take long to get comfortable with this, but play around a bit to make sure you're happy with things.