University of California, Berkeley

Electrical Engineering and Computer Sciences Department

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EE C245 / ME C218, Fall 2009
Introduction to MEMS Design

Tues. and Thurs: 3:30 am - 5:00 pm
103 Moffitt Library

Discussion Section:

Section 101:  Monday, 5:00 - 6:00 pm, 241 Cory Hall


Graduate standing in engineering or science; undergraduates with consent of instructor.

Note that the prequisite requirement (or apparent lack of one) for this course reflects the fact that the course itself is meant to serve all engineering departments. This is not to say that no prior knowledge is required for this course; rather, it is more a statement that if you lack the necessary background knowledge, you will need to study and learn the material somewhat independently. In particular, although some of the background material will be covered in lecture, there is simply not enough time to do a through job of it. Thus, those less familiar with the material will need to turn to supplementary materials, such as the reference texts.

Note that this course will rely on concepts from numerous disciplines, from electrical engineering, to mechanical engineering, to materials science, to chemical engineering. Thus, it is likely that nearly everyone will need to struggle with unfamiliar material at some point in the course.


  • Required:
    S. Senturia, Microsystem Design, 2nd Printing
    Various material to be distrbuted throughout the course.
  • Supplementary:
    G. Kovacs, Micromachined Transducers Sourcebook
    Jaeger, Introduction to Microelectronic Fabrication (Vol. V of the Modular Series on Solid State Devices), 2ndEdition
  • References:  (on reserve)
    C. Liu, Foundations of MEMS
    N. Maluf, An Introduction to Microelectromechanical Systems Engineering
    J. Pelesko & D. Bernstein, Modeling MEMS and NEMS

Course Details:
Course Information
Class Syllabus
Grading and Normalization Procedure
Academic Dishonesty Policy

Professor Clark Nguyen
574 Cory Hall
Phone: (510) 642-6251

Office Hours:
Monday, 2:30 - 4:00 pm, 574 Cory
Wednesday, 10:30 - 12:00 pm, 574 Cory

Teaching Assistant:
Mr. Chih-Ming Lin
5101 Etcheverry Hall
Phone:  (510) 643-9752

Office Hours:
Tuesday, Thursday 10:30-12:00 pm, 571 Cory Hall (tentative)

Instructional Support Assistant:
Rosita Alvarez-Croft
253 Cory Hall
(510) 643-4976

 Last updated 09/28/09 by RSAC