University of California, Berkeley

Electrical Engineering and Computer Sciences Department

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Spring 2017 Lecture Notes:

No. Date Lecture Module PDF
(marked)
Reading Video
1 Jan. 17 Administrative Information, MEMS Roadmaps, Benefits of Miniaturization Module1 Lecture1w
Lecture1m
  Video
2 Jan. 19 Benefits of Scaling I: faster speed (transistors, micromechanical resonators) Module2 Lecture2m
Lecture2w
  Video
3 Jan. 24 Benefits of Scaling II: lower power consumption (micro-ovens) Lecture3-4m
Lecture3-4w
  Video
4 Jan. 26 Covered in Lecture 3-4
 
5 Jan. 31 Benefits of Scaling III: higher sensitivity (gas sensors) Lecture5w
Lecture5m
  Video
6 Feb. 2 Fabrication Process Modules II: etching, ion implantation, diffusion Module3 Module4 Module5 Lecture6m1
Lecture6m2
Lecture6w
 
Video
7.x Process Module Details Video Lectures   Lectures use Modules 3 & 4
  Video1 Video2
7 Feb. 7 Surface Micromachining I: basic polysilicon process flow, release, sacrificial & structural material choices   Lecture7m1
Lecture7m2
Lecture7w
Surface Micromachining Video
8 Feb. 9 Surface Micromachining II: 2nd order issues, stiction, residual stress, electroplating, 3D out-of-plane MEMS, MUMPS, design rules, Summit   Lecture8m1
Lecture8w
Etch Rates Video
9 Feb. 14 Bulk Micromachining: wet etch-based, dissolved wafer process, SOI MEMS, Scream, Hexsil MEMS, sealed cavity deep RIE Module6 Lecture9m1
Lecture9m2
Lecture9w
Bulk Micromachining Video
10 Feb. 16 Mechanics of Materials for MEMS I: stress, strain, material properties   Module7 Lecture10m1
Lecture10m2
Lecture10w
  Video
11 Feb. 21 Mechanics of Materials for MEMS II: measurement & characterization of mechanical parameters, acoustic velocity, strength, quality factor.   Lecture11m1
Lecture11w
  Video
12 Feb. 23 Beam Bending I: internal bending moment, diff. eq. for beam bending   Module8 Lecture12m1
Lecture12m2
Lecture12w
  Video
13 Feb. 28 Beam Bending II: cantilever stiffness, practical stress Lecture12m2
Lecture13w
  Video
14 Mar. 2 Beam Combos I: series & parallel springs, folded flexures, spring circuit analysis   Lecture14w
  Video
15 Mar. 7 Beam Combos II: tensioned beam analysis, folded-beam stress   Lecture15m Lecture15m Lecture15w   Video
16 Mar. 9 Energy Methods: virtual work, energy formulations, tapered beam example Module9 Lecture16m1 Lecture16m2 Lecture16w   Video
17 Mar. 14 Resonance Frequency: estimating resonance frequency, lumped mass-spring approximation, distributed mass & stiffness, folded-beam resonator Module10   Lecture17w
  Video
18 Mar. 16 Equivalent Circuits I: dynamic mass, stiffness, and damping, example: free-free beam, lumped mass-spring-damper circuit   Module11   Lecture18m1
  Lecture18m2
  Lecture18w
    Video
19 Mar. 21 Lossless Transducers I: capacitive transducers, charge control, voltage control, spring suspended C, parallel-plate capacitive transducer, pull-in, linearization   Module12   Lecture19w     Video
  Mar. 23 Midterm Exam        
  Mar. 28 Spring Break        
  Mar. 30 Spring Break        
20 Apr. 4 Lossless Transducers II: linearity, electrical stiffness Lecture20m Lecture20w   Video
21 Apr. 6 Lossless Transducers III: comb drive Lecture21m
Lecture21w
 
Video
22 Apr. 11 Equivalent Circuits II: input modeling, force-to-velocity relationship & circuit, output modeling, complete equivalent circuit Module13 Lecture22m
Lecture22w
  Video
23 Apr. 13 Mechanical Circuit Analysis & Gyroscopes: impedance, input-to-output transconductance, gyroscopes Module14
Module15
Lecture23m1
Lecture23m2
Lecture23w
  Video
24 Apr. 18 Sensing Circuits I: velocity sensing, position sensing, op amp circuits Lecture24m1
Lecture24m2
Lecture24w
  Video
25 Apr. 21 Sensing Circuits II & Noise: differential position sensing, Noise Module17 Lecture25m1
Lecture25w
  Video
26 Apr. 25 Equivalent Input Noise: noise sources, noise example, equivalent input noise sources     Lecture26m
  Lecture26w
  Video
27 Apr. 27 Gyro Minimum Detectable Signal (MDS)   Lecture27m
Lecture27w
  Video
  May 2 Reading/Recitation/Review Day - No Lecture        
  May 4 Reading/Recitation/Review Day - No Lecture        
  May 12 Final Exam: Friday, May 12, 7-12 p.m. (Exam Group 20)        

NOTE:  * The asterisks indicate days that I will not be in town. On these dates, I will make appropriate arrangements for the lecture, which will probably entail doing and recording
(for website posting) a make-up lecture at a specified time and location.


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 Last updated 1/17/17 by CN