| No.
|
Date
|
Lecture
|
Module
|
PDF
(marked)
|
Handout
|
Video
|
| 1
|
Jan. 23
|
Administrative Information, MEMS Roadmaps, Benefits of Miniaturization
|
Module1
|
Lecture1w
Lecture1m
|
|
Video
|
| 2
|
Jan. 28
|
Benefits of Scaling I: faster speed (transistors, micromechanical resonators)
|
Module2
|
Lecture2m1
Lecture2m2
Lecture2w
|
|
Video
|
| 3
|
Jan. 30
|
Benefits of Scaling II: lower power consumption (micro-ovens)
|
|
Lecture3m
Lecture3w
|
|
Video
|
| 4
|
Feb. 4
|
Benefits of Scaling III: thermal circuits (lower power consumption)
|
|
Lecture4m
Lecture4w
|
|
Video
|
| 5
|
Feb. 6
|
Benefits of Scaling IV: higher sensitivity (gas sensors), Process Modules I
|
Module3
Module4
|
Lecture5m1
Lecture5m2
Lecture5m3
Lecture5w
|
|
Video
|
| 6
|
Feb. 11
|
Fabrication Process Modules II: etching, ion implantation, diffusion
|
Module5
|
Lecture6m1
Lecture6m2
Lecture6w
|
|
Video
|
| 7.x
|
|
Process Module Details Video Lectures
|
|
Lectures use Modules 3 & 4
|
|
Video1
Video2
|
| 7
|
Feb. 13
|
Surface Micromachining I: basic polysilicon process flow, release, sacrificial & structural material choices, stiction
|
|
Lecture7m1
Lecture7w
|
Surface Micromachining
Etch Rates
|
Video
|
| 8
|
Feb. 13
|
Surface Micromachining II: 2nd order issues, stiction, residual stress, electroplating, 3D out-of-plane MEMS, MUMPS, design rules, Summit
|
|
Lecture8m
Lecture8w
|
|
Video
|
| 9
|
Feb. 20
|
Bulk Micromachining I: anisotropic wet etching, boron etch stop, electrochemical etch stop, deep RIE, Xenon Diflouride, laser assisted etching
|
Module6
|
Lecture9m1
Lecture9m2
Lecture9w
|
Bulk Micromachining
|
Video
|
| 10
|
Feb. 25
|
Bulk Micromachining II & Mechanics of Materials for MEMS I: wafer bonding, stress, strain, material properties
|
Module7
|
Lecture10m1
Lecture10m2
Lecture10w
|
|
Video
|
| 11
|
Feb. 27
|
Mechanics of Materials for MEMS II: acoustic velocity, strength, quality factor, measurement & characterization of mechanical parameters.
|
|
Lecture11m1
Lecture11m2
Lecture11w
|
|
Video
|
| 12
|
Mar. 3
|
Beam Bending: internal bending moment, diff. eq. for beam bending, cantilever stiffness, practical stress
|
Module8
|
Lecture12w
|
|
Video
|
| 13
|
Mar. 5
|
Beam Combos I: series & parallel springs, folded flexures, spring circuit analysis
|
|
Lecture13m
Lecture13w
|
|
Video
|
| 14
|
Mar. 10
|
Beam Combos II: tensioned beam analysis, folded-beam stress
|
Module9
|
Lecture14m1
Lecture14m2
Lecture14w
|
|
Video
|
| 15
|
Mar. 12
|
Energy Methods: virtual work, energy formulations, tapered beam example, Resonance Frequency: estimating resonance frequency, lumped mass-spring approximation
|
Module10
|
Lecture15m1
Lecture15m2
Lecture15w
|
|
Video
|
| 16
|
Mar. 17
|
Resonance Frequency: distributed mass & stiffness, folded-beam resonator
|
|
Lecture16m
Lecture16w
|
|
Video
|
|
|
Mar. 19*
|
Midterm Exam
|
|
|
|
|
|
|
Mar. 24
|
Spring Break
|
|
|
|
|
|
|
Mar. 26
|
Spring Break
|
|
|
|
|
| 17
|
Mar. 31
|
Equivalent Circuits I: dynamic mass, stiffness, and damping, example: free-free beam, lumped mass-spring-damper circuit
|
Module11
Module12
|
Lecture17m
Lecture17w
|
Midterm Solutions
|
Video
|
| 18
|
Apr. 2
|
Lossless Transducers I: capacitive transducers, charge control, voltage control, spring suspended C, parallel-plate capacitive transducer, pull-in, linearization
|
|
Lecture18w
|
|
Video
|
| 19
|
Apr. 7
|
Lossless Transducers II: linearity, electrical stiffness
|
|
Lecture19m
Lecture19w
|
|
Video
|
| 21
|
Apr. 9
|
Lossless Transducers III: comb drive, start Equivalent Circuits II: transducer circuit models
|
Module 13
|
Lecture20m1
Lecture20m2
Lecture20w
|
|
Video
|
| 21
|
Apr. 14
|
Equivalent Circuits II: input modeling, force-to-velocity relationship & circuit, output modeling, complete equivalent circuit
|
Module15 |
Lecture21m
Lecture21w
|
|
Video
|
| 22
|
Apr. 16
|
Gyroscopes & Sensing Circuits I: gyroscopes, velocity sensing
|
Module14
|
Lecture22m1
Lecture22w
|
|
Video
|
| 23
|
Apr. 21
|
Sensing Circuits II: position sensing, op amp circuits, sensing circuit non-ideality, MEMS-transistor integration
|
Module16 |
Lecture23m1
Lecture23m2
Lecture23w
|
|
Video
|
| 24
|
Apr. 23
|
Noise I: MDS, noise circuit calculations, noise sources
|
Module17
|
Lecture24m
Lecture24w
|
|
Video
|
| 25
|
Apr. 28
|
Equivalent Input Noise: noise sources, noise example, equivalent input noise sources
|
|
Lecture25m
Lecture25w
|
|
Video
|
| 26
|
Apr. 30
|
Gyro Minimum Detectable Signal (MDS)
|
|
Lecture26m
Lecture26w
|
|
Video
|
|
|
May 5
|
Reading/Recitation/Review Day - No Lecture
|
|
|
|
|
|
|
May 7
|
Reading/Recitation/Review Day - No Lecture
|
|
|
|
|
|
|
May 13
|
Final Exam: Wednesday, May 13, 11:30 a.m.-2:30 p.m. (Exam Group 10)
|
|
|
|
|