Special Issues in Semiconductor Manufacturing

EECS 290H, 11:00 - 12:30 T&T in 293 Cory, Fall, 2005

Office Hours: Tuesday and Thursday 10-11am

This course addresses the issue of transferring novel IC technologies to high volume, high yield production. Three main topics will be covered:

  1. Experimental design techniques are used to optimize an IC fabrication process. We will discuss techniques ranging from simple comparison of treatments to complex multivariate response surface analysis. 
  2. The widespread application of statistical process control (SPC) in IC production was a major strategic goal for the 1990s. The goal for this decade is Advanced Process Control (APC). We will cover traditional SPC methods and we will detail their continuing evolution towards APC.
  3. Integrated circuits and fabrication processes must be designed for optimum manufacturability. We will address this issue by discussing several Design for Manufacturability techniques and tools.

The course is self-contained for the student whose background includes IC processing (EE143) and design (EE140 or EE141).   

Teaching Staff

Professor Costas J. Spanos                          
Phone: 510 643 6776
Fax : 510 642 2739
Office Hours: Tue/Thu 10-11am 510 Cory

Fall 05 Weekly ScheduleQuiz Answers

Resources (Generally available on the weekend prior to lectures)



Reading (restricted)

Additional Material



1st 8/29

     Introduction to IC Yield

     IC Yield

  Papers on IC Yield (restricted)



2nd 9/5

     Parametric Yield



  Homework 1&2, due 9/27/05


   Excel Sheet

3rd 9/12

     Yield Summary


  Worksheet on Defectivity / Cost Analysis



4th 9/19

     Basic Statistical Concepts

     Analysis of Variance

     Basic Statistics


  Homework 3, due 9/29/05


5th 9/26

     2-level Factorials

     ANOVA and Factorials


  Homework 4, due 10/13/05


6th 10/3

     Fractional Factorials





7th 10/10

     Regression Modeling

     Regression and PCA


  Homework 5, due 10/25/05


8th 10/17

     Robust Design





9th 10/24

     SPC Introduction

     Attribute Charts

     Statistical Process Control

  Fall 03 Project Reports (restricted)

  Homework 6, due 11/3/05

  Project Selection due 11/3/05


10th 10/31

     Control Charts for Variables

     Acceptance Charts

     Sample Quiz

     Sample Quiz Solutions


  Homework 7, due 11/15/05


11th 11/7

     CUSUM Charts

     Multivariate Control

     Advanced Process Control




12th 11/14

     Advanced Process Control

     Open Note QUIZ on Thursday 11/17





13th 11/21

     Sensors and Metrology I

     SIA Roadmap on Metrology




14th 11/28

     Sensors and Metrology II

     In Situ Sensors





15th 12/5

     On-Wafer Sensors


  Fall 05 Project Reports (restricted)

  Project Presentation

  Project Report



Last Updated 1/6/2006
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