EE 245 / NEEM 6441: Introduction to MEMS DesignReferences |
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References:This course will be based on a series of lecture notes which will be included in the course material shipped to you. While there is no required textbook, you may find the following references useful for background reading. Madou, Fundamentals of Microfabrication Elwenspoek & Jansen, Silicon Micromachining Sze, Semiconductor Sensors Ristic, Sensor Technology and Devices Senturia, Microsystem Design Kovacs, Micromachined Transducers Sourcebook Maluf, An Introduction to Microelectromechanical Systems Engineering Jaeger, Introduction to Microelectonic Fabrication |