Updated 3/24/08

Texts

This course will be based on a series of lecture notes which will be included in the course material shipped to you. While there is no required textbook, you may find the following references useful for background reading.

Madou, Fundamentals of Microfabrication

Elwenspoek & Jansen, Silicon Micromachining

Sze, Semiconductor Sensors

Ristic, Sensor Technology and Devices

Senturia, Microsystem Design
Consultant's coments: Surveys areas of physics and engineering that MEMS designers should know, with some applications case studies.

Kovacs, Micromachined Transducers Sourcebook

Maluf, An Introduction to Microelectromechanical Systems Engineering
Consultant's comments: An engaging but not very technical overview of the field

Jaeger, Introduction to Microelectonic Fabrication
Consultant's comments: A readable but basic text on fabrication. It's not specific to MEMS, and neglects some important MEMS-specific techniques.

Conferences

MEMS papers appear in conferences for many different fields, but here are the leading conferences dedicated to MEMS:
  • International Conference on Solid State Sensors and Actuators (Transducers)
  • Solid State Sensor and Actuator Workshop (Hilton Head)
  • International Conference on Micro Electro Mechanical Systems (MEMS)

Journals

Important journals in MEMS include:
  • IEEE/ASME Journal of Microelectromechanical Systems
  • Sensors and Actuators A and B
  • Journal of Micromechanics and Microengineering