Updated 3/24/08
TextsThis course will be based on a series of lecture notes which will be included in the course material shipped to you. While there is no required textbook, you may find the following references useful for background reading. Madou, Fundamentals of Microfabrication Elwenspoek & Jansen, Silicon Micromachining Sze, Semiconductor Sensors Ristic, Sensor Technology and Devices Senturia, Microsystem Design Kovacs, Micromachined Transducers Sourcebook Maluf, An Introduction to Microelectromechanical Systems
Engineering Jaeger, Introduction to Microelectonic Fabrication ConferencesMEMS papers appear in conferences for many different fields, but here are the leading conferences dedicated to MEMS:
JournalsImportant journals in MEMS include:
|