University of California, Berkeley

Electrical Engineering and Computer Sciences Department

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EE C247B / ME C218, Spring 2017
Introduction to MEMS Design

Tues. and Thurs: 3:30 pm - 5:00 pm
521 Cory Hall

Discussion Section:

 Wednesday, 2:00-3:00 p.m. in 247 Cory.


Graduate standing in engineering or science; undergraduates with consent of instructor.

Note that the prequisite requirement (or apparent lack of one) for this course reflects the fact that the course itself is meant to serve all engineering departments. This is not to say that no prior knowledge is required for this course; rather, it is more a statement that if you lack the necessary background knowledge, you will need to study and learn the material somewhat independently. In particular, although some of the background material will be covered in lecture, there is simply not enough time to do a thorough job of it. Thus, those less familiar with the material will need to turn to supplementary materials, such as the reference texts.

Note that this course will rely on concepts from numerous disciplines, from electrical engineering, to mechanical engineering, to materials science, to chemical engineering. Thus, it is likely that nearly everyone will need to struggle with unfamiliar material at some point in the course.


  • Required:
    S. Senturia, Microsystem Design, 2nd Printing
    Various material to be distrbuted throughout the course.
  • Supplementary:
    G. Kovacs, Micromachined Transducers Sourcebook
    Jaeger, Introduction to Microelectronic Fabrication (Vol. V of the Modular Series on Solid State Devices), 2ndEdition
  • References:  (on reserve)
    C. Liu, Foundations of MEMS
    N. Maluf, An Introduction to Microelectromechanical Systems Engineering
    J. Pelesko & D. Bernstein, Modeling MEMS and NEMS

Course Details:
Course Information
Class Syllabus
Grading and Normalization Procedure
Academic Dishonesty Policy

Professor Clark Nguyen
574 Cory Hall
Phone: (510) 642-6251

Office Hours:
Monday, 2:00 - 3:00 p.m., 574 Cory

Teaching Assistant:
Mr. Alper Ozgurluk
373 Cory Hall
Phone:  (510) 701-6897

Office Hours:
Monday, 3:30 p.m. - 5:00 p.m., 367 Cory
Friday, 1:00 p.m. - 2:00 p.m., 367 Cory

Office hours are the primary mechanism for individual contact with Professor Nguyen and your TA.
All students are strongly encouraged to make use of office hours.

 Last updated 1/17/17 by CN