EE143, Fall 2016
Microfabrication Technologies

• Lecture 0: Adminisrative (8/25/16)
• Lecture 1: Introduction and overview (8/25/16) Reading: Chap. 1 of Jaeger
• Lecture 2: Basic concepts of semiconductors (9/6/2016) Reading: Chap. 1 of Prof. Chenming Hu's textbook
• Lecture 3: Lithography (9/15/16, 9/20/16) Reading: Chap. 2 of Jaeger; Also, bCoureses > EL ENG 143> Files > Reader > Lithography
• Lecture 4: Etching (9/22/16, 9/27/16) Reading: bCoureses > EL ENG 143> Files > Reader > Etching

Midterm-1 up to Etching

• Lecture 5: Thermal oxidation (9/29/16) Reading: Chap. 3 of Jaeger. Here's the detailed derivation of Deal-Grove model
• Lecture 6: Thin film deposition (10/13/16) Reading: Chap. 6
• Lecture 7: Ion implantation (10/25/16) Reading: Chap. 5
• Lecture 8: Diffusion (11/3/16) Reading: Chap. 4
• Lecture 9: Metallization (11/10/16) Reading: Chap. 7
• Lecture 10: CPM (11/15/16) Watch this tutorial
• Lecture 11: Design rules and layout (11/17/16) Reading: Chap. 9.2.2-9.2.4
• Lecture 12: Process integration (11/22/16) Reading: Chap. 9
• Lecture 13: MOSFET devices (11/29/16)
• Lecture 14: MEMS Process (12/1/16)