Unless otherwise noted, all files are in pdf format. (Download Adobe Acrobat Reader here to read them).
Week 1 - Course Introduction and Functional Yield of Integrated Circuits
Week 2 - Parametric Yield
Week 3 - Parametric Yield (cont)
Week 4 - Statistical Estimation and Hypothesis Testing
Week 5 - Comparison of Treatments and ANOVA
Week 6 - Two-level Factorial Experiments, Fractional Factorials
Week 7 - Regression Analysis
Week 8 - Parameter Estimation
Week 9 - Robust Design
Week 9 - Introduction to SPC
Week 10 - Attribute Charts
Week 10 - Charts for Variables
Week 10 - Modified Charts and SPC Examples
Week 11 - CUSUM and EWMA
Week 12 - Multivariate and Model-based Control
Week 13 - Veteran's day and Mid term exam
Week 14 - From SPC to APC
Week 14 - Sensors and Metrology I and Sensors and Metrology II
Week 15 - In-situ Metrology and On-wafer Metrology