| No.
|
Date
|
Lecture
|
Module
|
PDF
(marked)
|
Handout
|
Video
|
| 1
|
Jan. 22
|
Administrative Information, MEMS Roadmaps, Benefits of Miniaturization
|
Module1
|
Lecture1w
Lecture1m
|
|
Video
|
| 2
|
Jan. 24
|
Benefits of Scaling I: faster speed (transistors, micromechanical resonators)
|
Module2
|
Lecture2m1
Lecture2m2
Lecture2w
|
|
Video
|
| 3
|
Jan. 29*
|
Benefits of Scaling II: lower power consumption (micro-ovens)
|
|
Lecture3-4m
Lecture3-4w
|
|
Video
|
| 4
|
Jan. 31*
|
Benefits of Scaling III: higher sensitivity (gas sensors)
|
|
Covered in Lecture 3-4
|
|
|
| 5
|
Feb. 5
|
Fabrication Process Modules I: photolithography, etching, oxidation
|
Module3
Module4
|
Lecture5w
Lecture5m1
Lecture5m2
Lecture5m3
|
|
Video
|
| 6
|
Feb. 7
|
Fabrication Process Modules II: film deposition, diffusion, ion implantation
|
|
Lecture6m1
Lecture6w
|
|
Video
|
| 7.x
|
|
Process Module Details Video Lectures
|
|
Lectures use Modules 3 & 4
|
|
Video1
Video2
|
| 7
|
Feb. 12
|
Surface Micromachining I: basic polysilicon process flow, release, sacrificial & structural material choices
|
Module5
|
Lecture7m1
Lecture7m2
Lecture7w
|
Surface Micromachining
Etch Rates
|
Video
|
| 8
|
Feb. 14
|
Surface Micromachining II: 2nd order issues, stiction
|
|
Lecture8m
Lecture8w
|
|
Video
|
| 9
|
Feb. 19
|
Surface Micromachining III: residual stress, topography, metal structures, foundry processes, Bulk Micromachining I: wet etch-based
|
Module6
|
Lecture9m1
Lecture9m2
Lecture9w
|
|
Video
|
| 10
|
Feb. 21
|
Bulk Micromachining II: anisotropic wet etching of Si, boron-doped etch stop, electrochemical etch stop, deep RIE, wafer bonding
|
|
Lecture10m1
Lecture10m2
Lecture10w
|
|
Video
|
| 11
|
Feb. 26
|
Mechanics of Materials for MEMS I: stress, strain, thermal expansion, acoustic velocity
|
Module7
|
Lecture11m
Lecture11w
|
|
Video
|
| 12
|
Feb. 28
|
Mechanics of Materials II: strength, quality factor, measurement & characterization of mechanical parameters
|
Module8
|
Lecture12m1
Lecture12w
|
|
Video
|
| 13
|
Mar. 5
|
Beam Bending: forces & moments, cantilever stiffness, practical stress
|
|
Lecture13w
|
|
Video
|
| 14
|
Mar. 7
|
Beam Combos I: bending via stress gradients, folded flexures, spring circuit analysis, series & parallel springs
|
|
Lecture14m
Lecture14w
|
|
Video
|
| 15
|
Mar. 12
|
Beam Combos II: mechanical filter example, tensioned beam analysis, folded-beam stress
|
|
Lecture15m
Lecture15w
|
|
Video
|
| 16
|
Mar. 14
|
Energy Methods: virtual work, energy formulations, tapered beam example
|
Module9
|
Lecture16m
Lecture16w
|
|
Video
|
| 17
|
Mar. 19*
|
Resonance Frequency: estimating resonance frequency, lumped mass-spring approximation, distributed mass & stiffness, folded-beam resonator
|
Module10
|
Lecture17m1
Lecture17m2
Lecture17w
|
|
Video
|
|
|
Mar. 21
|
Midterm Exam
|
|
|
|
|
|
|
Mar. 26
|
Spring Break
|
|
|
|
|
|
|
Mar. 28
|
Spring Break
|
|
|
|
|
| 18
|
Apr. 2
|
Equivalent Circuits I: dynamic mass, stiffness, and damping, example: free-free beam, lumped mass-spring-damper circuit
|
Module11
Module12
|
Lecture18m1
Lecture18w
|
|
Video
|
| 19
|
Apr. 4
|
Lossless Transducers I: charge control, voltage control, spring suspended C, parallel-plate capacitive transducer, pull-in
|
|
Lecture19w
|
|
Video
|
| 20
|
Apr. 9
|
Lossless Transducers II: linearity, electrical stiffness
|
|
Lecture20m
Lecture20w
|
|
Video
|
| 21
|
Apr. 11
|
Lossless Transducers III: comb drive
|
Module13
|
Lecture21m1
Lecture21m2
Lecture21w
|
|
Video
|
| 22
|
Apr. 16*
|
Equivalent Circuits II: input modeling, force-to-velocity relationship & circuit, output modeling, complete equivalent circuit
|
Module15 |
Lecture22m1
Lecture22m2
Lecture22w
|
|
Video
|
| 23
|
Apr. 18*
|
Gyroscopes & Sensing Circuits I: gyroscopes, resistive velocity sensing, transresistance velocity sensing
|
Module14
|
Lecture23m1
Lecture23w
|
|
Video
|
| 24
|
Apr. 23
|
Sensing Circuits II & Integration: position sensing, op amp nonideality, integration
|
Module16 |
Lecture24m1
Lecture24m2
Lecture24w |
|
Video
|
| 25
|
Apr. 25
|
Noise: MDS, circuit noise calculations
|
Module17
|
Lecture25m1
Lecture25m2
Lecture25w
|
|
Video
|
| 26
|
Apr. 30
|
Noise II: noise sources, noise example, gyro drive-to-sense transfer function
|
|
Lecture26m
Lecture26w
|
|
Video
|
| 27
|
May 2
|
Gyro Minimum Detectable Signal (MDS)
|
|
Lecture27m
Lecture27w
|
|
Video
|
|
|
May 1
|
Reading/Recitation/Review Day - No Lecture
|
|
|
|
|
|
|
May 3
|
Reading/Recitation/Review Day - No Lecture
|
|
|
|
|
|
|
May 16
|
Final Exam: Thursday, May 16, 8-11 a.m. (Exam Group 13)
|
|
|
|
|